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发明名称
TABUNG SINAR KATODA
摘要
申请公布号
ID19212(A)
申请公布日期
1998.06.28
申请号
ID19970003010
申请日期
1997.08.28
申请人
HITACHI, LTD;HITACHI DEVICE ENGINEERING CO, LTD
发明人
MASAHIRO NISHIZAWA;NORIKAZU UCHIYAMA;TOSHIO TOJO
分类号
G02B1/11;C03C17/34;H01J29/86;H01J29/88;H01J29/89;H01J31/20;(IPC1-7):H01J29/86
主分类号
G02B1/11
代理机构
代理人
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