| 摘要 |
<p>PROBLEM TO BE SOLVED: To avoid such a problem for a pellicle produced by adhering a pellicle film on the top end face of a pellicle frame that a printed part for the product number of the pellicle attracts foreign matters or causes deposition of foreign matters, and to easily visually check the product number by irradiating the outer surface of the pellicle frame with laser light to print the product number of the pellicle. SOLUTION: A pellicle film 2 is adhered to the top end face of a pellicle frame 1 while an adhesive layer 3 is formed on the lower end face and a release layer 4 is formed thereon. The outer surface of the pellicle frame 1, especially the outer side surface of the frame as a printing part 5 is irradiated with laser light to print the product number. Namely, the laser light is scanned on the track along the characters to be printed so that the color of the surface is changed by heating with the laser light. If the heating energy is too much, sharp print is obtd. but the pellicle frame surface melts to produce small pores. Moreover, the surface layer on the interface in the part not heated peels due to thermal expansion in the heated part and produces foreign matters. If the heating energy is not enough, obscure print is obtd.</p> |
