ENVIRONMENTAL CONTROL TYPE SCAN ELECTRON MICROSCOPE,申请号JP19960328153-传众专利搜索

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发明名称	ENVIRONMENTAL CONTROL TYPE SCAN ELECTRON MICROSCOPE
摘要
申请公布号	JPH10172495(A)	申请公布日期	1998.06.26
申请号	JP19960328153	申请日期	1996.12.09
申请人	NIKON CORP	发明人	MIYAZAKI YASUMICHI
分类号	H01J37/20;H01J37/248;H01J37/28;(IPC1-7):H01J37/28	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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