| 摘要 |
PROBLEM TO BE SOLVED: To prevent impurities from mixing into laser gas so as to elongate its service life. SOLUTION: The excimer laser device is equipped with a laser chamber 1 sealed with laser gas, a cross flow fan 2 which circulates laser gas, a magnetic torque coupling 45 which transmits the driving force of a motor 40 to the rotating shaft 3 on the cross flow fan 2 side through a magnetic force induced between the opposed magnetic poles, a casing 5 which is mounted on the laser chamber 1 provided with a barrier 35 provided between the opposed magnetic poles of the magnetic torque coupling 45 to isolate laser gas from the outside, and a magnetic bearing 20 which is supported on the inner wall of the casing 5 to releasably support the rotating shaft 3 in a non-contact and freely rotatable manner. In this case, a chamber 6 which houses the magnetic bearing 20 and the magnetic torque coupling 45, a gas cleaning device which cleans laser gas filled into the laser chamber 1, and a gas path 7 through which clean laser gas is fed to the chamber 6 are provided. |
