| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor whose cost can be reduced. SOLUTION: In the substrate processor which once carries a substrate W into a storage room 3 from outside the processor through a door 31, transports the substrate W to the processing room through a transportation room 2 and executes a prescribed processing, a filter plate 311 having multiple small holes on the inner face of the door 31 is provided. Inert gas supplied from a gas supply pipe 63 is uniformly ejected through the filter plate 311. An exhaust pipe 73 is connected to the lower part of the valve box 531 of a gate valve 53 between the storage room 3 and the transportation room 2. Thus, gas which is uniformly ejected from the filter plate 311 passes through the plural substrates W and is exhausted from the valve box 531. Gas in the storage room 3 is efficiently substituted and gas can be substituted without making the storage room 3 into vacuum. Consequently, it is not necessary to make the storage room 3 into structure proof against vacuum, a vacuum generation device is not required and cost can be reduced. |
