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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10172992(A)
申请公布日期
1998.06.26
申请号
JP19960352256
申请日期
1996.12.12
申请人
NEC CORP
发明人
SAITO SHIGERU
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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