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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH10172987(A)
申请公布日期
1998.06.26
申请号
JP19960333606
申请日期
1996.12.13
申请人
NEC CORP
发明人
MATSUMURA TAKAO
分类号
H01L29/41;H01L21/338;H01L27/095;H01L29/812;(IPC1-7):H01L21/338
主分类号
H01L29/41
代理机构
代理人
主权项
地址
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