发明名称 SEMICONDUCTOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To reduce the light losses of a large-area semiconductor element and its surface by continuously manufacturing the element by forming a first electrode of a substrate composed an aggregate of carbon fibers, a silicon semiconductor layer on the surface of the substrate, and an oxide layer by oxidizing the surface of the semiconductor layer and bringing the oxide layer into contact with a second electrode. SOLUTION: A first electrode is formed of a substrate 4 composed of an aggregate of carbon fibers 1 and a semiconductor layer 2 is formed on the surface of the substrate 4. Then an oxide layer 3 is formed by oxidizing the surface of the semiconductor layer 2 and at least part of the oxide layer 3 is brought into contact with a second electrode 12. The semiconductor layer 2 is formed by winding the substrate 4 composed of an aggregate of carbon fibers 1 in a roll and continuously feeding the substrate 4 to a semiconductor layer forming device. Therefore, a large-area semiconductor element can be manufactured efficiently and the energy efficiency of the semiconductor element can be improved.
申请公布号 JPH10173213(A) 申请公布日期 1998.06.26
申请号 JP19960326909 申请日期 1996.12.06
申请人 MITSUBISHI HEAVY IND LTD 发明人 ISHIHARA NOBUO
分类号 G01J1/02;H01L21/28;H01L31/02;H01L31/042;H01L33/28;H01L33/30;H01L33/34;H01L33/38;H01S5/00;H01S5/042 主分类号 G01J1/02
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