| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor for car, etc., which can sense the angular velocity accurately using a simple configuration and can easily and effectively execute the adjustment of the resonance frequency of a mass part as an inertial mass. SOLUTION: Angular velocity sensor for car is equipped with mass displacement supporting beams 20-23 to support the vibration of mass part 1 in the displacement direction generated by Corioli's force and a mass excitative supporting beam (beam bodies 10-17 and couplings 80 and 81) to support the mass displacement support bases 24 and 25 in such a way as admitting vibration of mass part 1 in the exciting direction. When the base part 24 is vibrated in the excitation direction by a comb-shaped excitor electrode 51 situated opposing, the mass part 1 is excited through the beams 22 and 23. An extension electrode 31 exists on the side face of the mass part 1 about the Corioli force sensing direction, and opposing thereto capacitance sensing electrodes 30 and 32 are installed. When Corioli's force acts on the mass part 1 vibrating in the excitation direction, the mass part 1 vibrates also in the sensing direction, and this is sensed in the form of change in the capacitance by the elecrodes 30 and 32. It is also possible to adjust the excitation frequency by furnishing a mechanism to give stress to the beam bodies 10-17. |
