| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide that can have the function of an optical fiber and the function of a quartz waveguide integratedly, and a make an optical device small-sized, and also has various optical functions. SOLUTION: On a silicon substrate 1, a quartz waveguide, which has a quartz waveguide clad 4 with a low refractive index and quartz waveguide cores 5A and 5B with a high refractive index, is formed. The clad and core are removed at a part where the crystal azimuth of the silicon substrate and the direction of the core match each other and a V groove 2 is formed in the exposed silicon substrate 1 along the crystal azimuth of the silicon substrate 1 by wet etching or dry etching, and both end surfaces of an optical fiber grating 6 put in the V groove 2 and the remaining part of the quartz waveguide are put close to each other and the quartz waveguide core and the core of the optical fiber grating 6 are optically coupled with each other. |
