| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to shorten time required for measuring once and to perform measurement of a sufficient number of measuring points, by performing measurement at measuring points capable of calculating an error component originating on a board side, and performing measurement at measuring points capable of calculating an error component originating in a mask or reticle projection optical system side. SOLUTION: Developed boards 10 are lapped up at every lot and are carried into a lap inspecting apparatus, and lap measurement is performed. After the finish of this lap measurement, the precision of lapping being a measured result is measured accurately and the precision of lapping is corrected. As an inspection in this first stage, correction values of the boards 10 are calculated at specified measuring points. Next, at measuring points for measurement in the second stage, measurement is performed for the purpose of correction on the side of a reticle lens. Namely, a shot by the same reticle in a board 10 is only for panels 11, but a lap correction value on the reticle lens side at each shot is calculated by measuring points of at least four corners within that shot. |
