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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10172975(A)
申请公布日期
1998.06.26
申请号
JP19960342501
申请日期
1996.12.06
申请人
RICOH CO LTD
发明人
YAMAMOTO NORIYOSHI
分类号
H01L21/3213;(IPC1-7):H01L21/321
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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