| 摘要 |
PROBLEM TO BE SOLVED: To make an AFM cantilever possible to perform a side wall observation and a surface observation simultaneously by forming the tip part of a probe part provided at the opposite side of a support part placement surface into a spherical shape. SOLUTION: The probe part 1 comprises a probe substrate part 1a consisting of, for example, silicon nitride and a surface forming material 1b consisting of, for example, silicon nitride film formed on the surface and is approximately 3-15μm long. A cantilever part 3 has the probe part 1 at a free edge, is made of a cantilever base part 3a consisting of, for example, silicon nitride as in the probe part 1 and a surface formation material 3b consisting of, for example, silicon nitride film formed on the surface and is several hundreds nm to severalμm wide. A spherical tip part 2 is formed at the tip of the probe part 1. Since the spherical tip part 2 is formed, the probe part 1 can observe the surface and can measured both the surface recessed and projection of, for example, a trench hold side wall. A light reflection film for detecting the amount of displacement of the cantilever part 3 may be formed on the rear surface of the cantilever part 3, namely on the surface where a support part 4 is provided.
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