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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH10172954(A)
申请公布日期
1998.06.26
申请号
JP19960326441
申请日期
1996.12.06
申请人
HITACHI LTD
发明人
SUMIYA MASANORI;FUJII TAKASHI;KANEKIYO TAKAMITSU;MATSUMOTO EIJI;AKIYAMA HIROSHI;SUGANO JUNICHI
分类号
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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