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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
JPH10173047(A)
申请公布日期
1998.06.26
申请号
JP19960330796
申请日期
1996.12.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUURA MASAZUMI
分类号
H01L21/768;H01L21/314;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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