发明名称 MAGNETO-RESISTIVE EFFECT MAGNETIC HEAD AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To work with precise processing by forming a pattern providing a working amount with the same process as a magneto-resistive effect film and forming target patterns with electrode patterns having thickness of 0.1μm or above on its both sides. SOLUTION: A drawing conductor 11 of thickness 300nm is retrieved first by a stereomicroscope from a processing side while processing or when the processing is ended. Thereafter, the presence of the magneto-resistive effect film 10 of thickness 20nm is detected by an optical microscope. At this time, when the pattern is arranged beforehand so that the magneto-resistive effect film 10 disappears when the required processing amount (element height) is obtained, the matter that a magnetic head becomes the specified element height corresponding to that is discriminated by the disappearance of the magneto- resistive effect film 10. Further, this optical read pattern is one formed in the process forming a real element, and the necessity that the process is added for the optical read pattern is eliminated.
申请公布号 JPH10172116(A) 申请公布日期 1998.06.26
申请号 JP19960328184 申请日期 1996.12.09
申请人 HITACHI LTD 发明人 IMANAKA RITSU;MORIJIRI MAKOTO;KOBAYASHI TETSUO;SUZUKI NOBUO;KOYANAGI HIROAKI;SASADA YUKIO;ISONO CHIHIRO
分类号 G11B5/39;(IPC1-7):G11B5/39 主分类号 G11B5/39
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