TUNABLE DIELECTRIC FLIP CHIP VARACTORS

摘要

The present invention is directed to a method for forming electrically tunable varactors independently of the circuit in which the varactors are to be incorporated. In the method, a tunable dielectric material is deposited on a substrate, subjected to thermal treatment to reduce crystalline defects, metallized, and the layered structure subdivided into a number of varactors. The varactors are bonded using flip chip techniques to a circuit. The present invention further provides varactors having differing configurations. One varactor configuration includes stacked conductor pairs separated by a nontunable insulating material having a low electric permittivity.