发明名称 |
METHOD OF AND APPARATUS FOR MATCHING A LOAD TO A SOURCE |
摘要 |
An arrangement and method for matching a load and a power source, such as an r.f. power source for a vacuum plasma processing chamber, includes a match network coupled between the power source and the load. The match network has at least two controllably variable electrical characteristics. A sensor is provided that senses at least two parameters of the load. A drive controller responds to the sensed parameters of the load to independently control varying a first one of the electrical characteristics of the match network as a function of only one of the parameters of the load, and a second one of the electrical characteristics of the match network as a function of another one of the parameters of the load. This is done until the power source and the load are in a matched condition. The separation of the match variables to establish a nearly one-to-one correspondence with the load parameters allows independent adjustment of the match variables to provide fast and unambiguous reaching of the matched condition.
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申请公布号 |
WO9827646(A1) |
申请公布日期 |
1998.06.25 |
申请号 |
WO1997US23716 |
申请日期 |
1997.12.19 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
WILLIAMS, NORMAN;JEWETT, RUSSEL, F., JR. |
分类号 |
H01L21/302;H01J37/32;H01L21/205;H01L21/3065;H03H7/40;(IPC1-7):H03H7/40 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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