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发明名称
INTEGRIERTE HALBLEITERSCHALTUNGSANORDNUNG
摘要
申请公布号
DE69129445(D1)
申请公布日期
1998.06.25
申请号
DE19916029445
申请日期
1991.07.19
申请人
SEIKO EPSON CORP., TOKIO/TOKYO, JP
发明人
SASAKI, MINORU, 3-5, OWA 3-CHOME, NAGANO-KEN 392, JP
分类号
H01L21/768;H01L27/02;H01L27/04;H01L27/108;(IPC1-7):H01L27/04;H01L27/10
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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