| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to have alignment makers and/or electrodes to allow alignment with good accuracy so that the alignment of mounting grooves, such as V-grooves, for mounting optical waveguide bodies, such as optical fibers and optical waveguides, electrodes for mounting optical elements or the mounting grooves and the alignment markers for mounting the optical elements can be executed with the good accuracy. SOLUTION: The mounting groves 7 and the electrodes for mounting the optical elements and/or the alignment markers are formed by photolithography using a photomask having the mounting groove patterns for mounting the optical wavegudie bodies and the electrode patterns for mounting the optical elements and/or the alignment marker patterns which are the earmarks at the time of mounting the optical elements formed on a substrate 1. The optical module is formed by optically coupling the optical waveguide bodies and the optical elements on the optical device packaging substrate S. |
