| 摘要 |
A three-dimensional multi-chip module (MCM) is formed as a stack of twodimensional multi-chip modules comprising substrates (1) which have electrically signal paths connecting integrated circuit chips (3) and has vertical interconnections of the signal paths, provided by interconnection or via chips (9). The individual chips (3, 9) or other inner components (15) on a substrate (1) are in mechanical contact with a surface of an adjacent substrate and constitute the distance means maintaining the substrates spaced from each other. Thus heat developed in components can be conducted essentially perpendicularly to the substrates (1). Thermally conducting chips (15) can be used for improving the conducting of heat. Cooling means (19) are located only at the top and bottom surfaces of the stack. Channels (35) are formed between the chips and components which can be used for cooling and furthermore spaces (38) are formed at the edges of the substrates in which electrical connectors (37) can be inserted for coupling the stack to a similar stack. The components (1, 3, 9, 15) of the stack is maintained in a detachable manner in electrical and mechanical contact with each other by applying a compressive force and by using elastic connecting and guiding means (21, 25, 27). In particular bumps (21) can be arranged cooperating with edge surfaces of components to guide components to correct positions. |
