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发明名称
CANTILEVER MOUNT FOR ROTATING CYLINDRICAL MAGNETRONS
摘要
申请公布号
EP0543844(B1)
申请公布日期
1998.06.24
申请号
EP19910914088
申请日期
1991.07.31
申请人
VIRATEC THIN FILMS, INC.
发明人
STEVENSON, DAVID E.;BJORNARD, ERIK J.;HUMBERSTONE, GEOFFREY H.
分类号
C23C14/34;C23C14/35;H01J37/34;(IPC1-7):C23C14/35
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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