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发明名称
摘要
申请公布号	FR2088595(A5)	申请公布日期	1972.01.07
申请号	FR19700013995	申请日期	1970.04.17
申请人	INFORMATIQUE CIE INTERNA	发明人
分类号	C23F1/02;H01L21/48;H01L49/02;H05K3/06;(IPC1-7):B44C1/00;H01L19/00	主分类号	C23F1/02
代理机构		代理人
主权项
地址

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