发明名称 Photon assisted sub-tunneling electrical probe, probe tip, and probing method
摘要 An improved non-contact electrical measurement system, method, probe assembly, and probe. A probe having a photoemissive coating deposited thereon is provided and disposed substantially adjacent a measurement site of a test sample. The photoemissive coating of the probe is illuminated by a light source, and electrical measurements are made upon the photoemissive coating to determine the electrical characteristics of the measurement site.
申请公布号 US5770946(A) 申请公布日期 1998.06.23
申请号 US19960597341 申请日期 1996.02.06
申请人 PATTERSON, JOSEPH M. 发明人 PATTERSON, JOSEPH M.
分类号 G01Q70/10;G01Q70/14;G01R1/07;G01R31/311;(IPC1-7):G01R31/302 主分类号 G01Q70/10
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