发明名称 |
Coaxial drive elevator |
摘要 |
The present invention resides in an elevator mechanism comprising a base plate defining the bottom wall of a chamber disposed above the base plate. The base plate has a top surface and a bottom surface with an opening therein communicating between the top and bottom surfaces. A first drive is disposed below the base plate for linear movement parallel to a first given direction. A carriage is connected for movement to the first drive and carries a lift tube extended upwards from the carriage along the given direction and through the opening in the base plate. The lift tube including a coaxially disposed rotary shaft therewithin. A second drive having an output is provided and is supported on the carriage parallel to the given direction and spaced from the rotary shaft in a side-by-side orientation. A coupling is also provided for drivingly connecting the output of the second drive to the rotary shaft.
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申请公布号 |
US5769184(A) |
申请公布日期 |
1998.06.23 |
申请号 |
US19960722353 |
申请日期 |
1996.09.27 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
HOFMEISTER, CHRISTOPHER A. |
分类号 |
B65G49/07;B66B9/02;F16H25/20;H01L21/00;H01L21/677;H01L21/687;(IPC1-7):B66B9/02 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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