High performance micromechanical tunable verticle cavity surface emitting laser

摘要

An electrostatically controlled cantilever apparatus for continuous tuning of the resonance wavelength of a Fabry-Perot cavity is disclosed. A resonant cavity is formed between two distributed Bragg reflector (DBR) mirrors each composed of multiple DBR layers. One such layer is replaced with a layer which has been fully oxidized except for a small aperture. This layer provides both optical and current confinement which allows for low threshold currents and high output power.