SYNTHESIZING METHOD OF DIAMOND

摘要

PROBLEM TO BE SOLVED: To provide a high-quality diamond film having a large area. SOLUTION: In this method, diamond is synthesized on a substrate 11 from a plasma state containing a carbon component. A filament 3 is disposed above the substrate 11 and contains tungsten as a hot electron releasing material. An electrode 4 is disposed apart from the filament 3, and a potential relatively higher than the potential of the substrate 11 is at least temporarily applied on the filament 3, while a potential relatively higher than the potential of the filament 3 is at least temporarily applied on the electrode 4. Thereby, plasma is produced between the filament 3 and the substrate 11 and electrons are made to move from the filament 3 to the electrode 4 to produce plasma between the filament 3 and the electrode 4.