发明名称 Cleaning composition for mold for molding semiconductor device and method of cleaning mold using the same
摘要 <p>A cleaning composition for a mold for molding a semiconductor device comprising an unvulcanized rubber, a cleaning agent, and water in an amount of from 1 to 30% by weight based on the total amount of the cleaning composition. The cleaning composition is preferably used as a sheet form comprising the cleaning composition itself, wherein a plurality of straight cuts are formed on the surface of the sheet in a definite direction in parallel at an definite interval for enabling folding of the sheet and at least one cutting cut may be formed on the surface such that the cutting cut crosses perpendicularly to the plural cuts. The cleaning sheet is very effective to remove soiled material on the inside surfaces of a mold formed by repeatedly molding semiconductor devices using a thermosetting resin composition. &lt;IMAGE&gt;</p>
申请公布号 EP0847843(A1) 申请公布日期 1998.06.17
申请号 EP19970110511 申请日期 1997.06.26
申请人 NITTO DENKO CORPORATION 发明人 TAKASHIMA, KOUICHI
分类号 C11D7/44;C11D7/26;B29C33/72;C11D3/28;C11D7/32;C11D7/60;C11D11/00;C11D17/04;C11D17/06;H01L21/304;H01L21/56;(IPC1-7):B29C33/72 主分类号 C11D7/44
代理机构 代理人
主权项
地址