| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily peel a material to be held from a member for arranging the material to be held for an electrostatic chuck even if the member rises to a high temp. by forming a releasable carbon film on the surface to be arranged with the material to be held of a base body consisting of an electrical insulative material, thereby constituting the member described above. SOLUTION: The electrostatic chuck E is constituted by connecting a DC power source E3 between an electrode E1 covered with an insulator E2 on its one surface and the material E4 to be held which is held on the surface of the electrode E1 and the insulator E2. At this time, the surface E2' to be arranged with the material E4 to be held of the insulator E2 is previously formed with the carbon film C which consists of DLC and has the release property by a plasma CVD method. The member for arranging the material to be held comprises the insulator E2 and the carbon film C. As a result, the material E4 to be held is subjected to a prescribed treatment in the state of holding the material E4 to be held and the member for arranging the material to be held which is capable of easily peeling the material E4 to be held even if the insulator E2 rises to a high temp. is obtd.</p> |
