发明名称 Electric circuit substrate having a multilayer alignment mark structure
摘要 An electric circuit substrate having a multilayer structure is constituted from at least three wiring layers including an outermost wiring layer, at least one first inner wiring layer disposed under the outermost wiring layer, and a second inner wiring layer disposed under the at least one first inner wiring layer, each provided with a prescribed conductor pattern, respectively. In the multilayer structure, the outermost wiring layer has an alignment mark, the above-mentioned at least one first inner wiring layer has a blank portion free from its conductor pattern in a position immediately under the alignment mark, and the second inner wiring layer has an entire solid portion of its conductor pattern in a position immediately under the blank portion. The above multilayer structure including the alignment mark is effective in preventing recognition error or recognition failure of the alignment mark, thus allowing accurate positioning of the electric circuit substrate.
申请公布号 US5768107(A) 申请公布日期 1998.06.16
申请号 US19960666811 申请日期 1996.06.19
申请人 CANON KABUSHIKI KAISHA 发明人 OUCHI, TOSHIMICHI;TAKAHASHI, MASANORI
分类号 H05K1/02;H05K3/00;H05K3/36;H05K3/46;(IPC1-7):H05K1/14 主分类号 H05K1/02
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