发明名称 |
VCR head drum coated with diamond-like hard carbon films and the method and apparatus for manufacturing the same |
摘要 |
A head drum is coated with double films, each having different characteristics, by forming a first diamond-like hard carbon film of high degree of hardness and then forming a second diamond-like hard carbon film of a lower degree of hardness thereon. The degree of hardness of the second film is lower than that of the first film. The double coating is performed by means of a synthesizing apparatus which comprises a reactor consisting of a power supply electrode, a workpiece support and an annular ground electrode spaced from the stacked head drums by a predetermined distance.
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申请公布号 |
US5768046(A) |
申请公布日期 |
1998.06.16 |
申请号 |
US19970820163 |
申请日期 |
1997.03.19 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, KWANG-RYEOL;EUN, KWANG-YONG;KIM, KEUN-MO |
分类号 |
G11B5/53;B81C99/00;C23C16/26;C23C16/27;C23C16/458;C23C16/50;C23C16/509;G11B15/18;G11B15/61;G11B15/62;G11B23/50;(IPC1-7):G11B5/40;C23C16/00 |
主分类号 |
G11B5/53 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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