VERTICAL HEAT TREATMENT DEVICE

摘要

The present invention provides a vertical heat treatment equipment ensuring a good uniformity and repeatability of a workpiece. A heater (21) of a heating furnace (2) is disposed laterally of a heat-treatment position (13) in a process chamber (1) whereby the process chamber (1) has a distribution in which a heating temperature is the highest at the heat-treatment position (13) and gradually decreases with increase in a vertical distance therefrom. <IMAGE>