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发明名称
PRODUCTION OF PATTERN FORMING BODY
摘要
申请公布号
JPH10158883(A)
申请公布日期
1998.06.16
申请号
JP19960317490
申请日期
1996.11.28
申请人
NIKON CORP
发明人
SHIMIZU SUMUTO
分类号
G03F7/105;C25D5/02;(IPC1-7):C25D5/02
主分类号
G03F7/105
代理机构
代理人
主权项
地址
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