| 摘要 |
PROBLEM TO BE SOLVED: To provide a transportation device with which the generation of a liquid pool is prevented, the contact of transporting rollers with circuit forming surfaces is averted, medicinal liquids, etc., are extremely uniformly injected and the mingling of the liquid between stages is prevented. SOLUTION: This transportation device 11 is used in a production stage for thin panels E formed with the circuits on the substrate surfaces. While the panels E are transported, the panels are subjected to a medicinal liquid treatment and washing treatment. The panels E are slightly inclined from perpendicular and the circuit forming surfaces D on the front surfaces are directed upward and rear surfaces P of the panels are directed downward. While the rear surfaces P and bottom ends Q are held by a transporting device 12, the medicinal liquids, water, etc., are injected from spraying nozzles 13 toward the panels. The spraying nozzles 13 are arranged to incline vertically and make oscillation motion. Slit-like air nozzles which inject air respectively upstream and downstream are interposed between the two transportation treating devices 11 on the upstream and the downstream. |
