发明名称 Plasma generation and plasma processing of materials
摘要 A plasma generation system includes one or more pairs of electrode units. Each electrode unit emits a plasma carrying gas along a respective axis. Each pair of electrode units is connected to an electric power supply that creates an electric discharge through the gas jets emitted by the two units. The axes of the two units define a "basic" plane. Each unit is associated with a magnetic circuit having two poles on the opposite sides of the basic plane. Each of these circuits is used to move the plasma gas jet emitted by the respective unit towards or away from the plasma jet emitted by the other unit of the pair of units. Therefore, these circuits control the angle at which the plasma jets meet. In addition, for each pair of the electrode units, a three-pole magnetic circuit is provided to move the plasma jets perpendicularly to the basic plane. The three poles of the magnetic circuit extend substantially along the basic plane. The three poles include a "first" pole, a "second" pole, and "middle" pole between the first and second poles. One of the plasma jets is controlled by the magnetic field passing through the first and middle poles, and the other plasma jet is controlled by the magnetic field passing through the second and middle poles.
申请公布号 US5767627(A) 申请公布日期 1998.06.16
申请号 US19970781568 申请日期 1997.01.09
申请人 TRUSI TECHNOLOGIES, LLC 发明人 SINIAGUINE, OLEG
分类号 H05H1/24;H05H1/40;H05H1/42;H05H1/44;H05H1/46;(IPC1-7):H01J7/24 主分类号 H05H1/24
代理机构 代理人
主权项
地址