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发明名称
FILM FORMING SYSTEM
摘要
申请公布号
JPH10158842(A)
申请公布日期
1998.06.16
申请号
JP19960322935
申请日期
1996.12.03
申请人
TOSHIBA CORP
发明人
MIYAJIMA HIDESHI
分类号
C23C16/44;C23C16/455;C23C16/50;C23C16/509;C23C16/52;H01L21/205;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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