发明名称 OBJECT-TO-BE-CONVEYED CONVEYING METHOD IN FLOATATION TYPE CONVEYING DEVICE AND FLOATATION TYPE CONVEYING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a floatation type conveying device, by which uniform pressure film is formed between an object to be conveyed and a conveying member and stability in the floating condition of the object to be conveyed is stability so that the object to be conveyed can be conveyed without any deflection from a target route, at a low cost. SOLUTION: Conveying members 2a, 3a provided with multiple small diameter jetting ports 5 are arranged in a conveying path, and fluid serving as a conveying medium is jetted from the conveying members 2a, 3a so as to float and convey an object to be conveyed without any contact with the conveying path. The conveying members 2a, 3a are formed of porous material, and the vacuum conveying member 2a provided with a vacuum port 2 is arranged in the center of the conveying path while the pressurizing conveying members 3a provided with a pressurizing port 3 are arranged in the both end parts of the conveying path, so that the conveying medium flows from the both end parts to the center part, and the object to be conveyed is floated while being guided toward the center part of the conveying path so as to be conveyed in a required direction.
申请公布号 JPH10157851(A) 申请公布日期 1998.06.16
申请号 JP19960321229 申请日期 1996.12.02
申请人 CKD CORP 发明人 UCHIDA KOJI;NARUSE HIROAKI;YOSHIMOTO SHIGETAKA
分类号 B65G51/03;H01L21/677;H01L21/68;(IPC1-7):B65G51/03 主分类号 B65G51/03
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