| 摘要 |
PROBLEM TO BE SOLVED: To heighten accuracy of teaching data in acquisition of teaching data used to drive a transferring machine by correcting position data, detected by a detecting means, on the basis of the disposed position of the detecting means for detecting the position data showing the position of the transfer machine at the time of transferring substrates. SOLUTION: In teaching operation of a transferring machine 4, the position of a jig is detected by a detecting means 10 in the state of the transferring machine 4 being fixed in a home position, and the obtained position data is stored in a memory 14. In acquisition of this position data, the position data detected by the detecting means 10 is subjected to specified temperature correction processing. In case of low temperature, for instance, sensor output voltage is read as initial data, and then sensor output voltage at specified temperature before actual processing is read. The difference value of these sensor output voltage is computed, and the correction value is obtained using this difference value. The position data stored in the memory 14 is then outputted to a controller 7 to put the transferring machine 4 in action. |
