| 摘要 |
PROBLEM TO BE SOLVED: To obtain high quality silicon oxynitride power whose chemical compsn., specific surface area and particle size distribution have been highly controlled by subjecting a nitrogen-contg. silane compd. to oxidation treatment and firing the resultant powdery precursor under specified conditions. SOLUTION: A nitrogen-contg. silane compd. such as silicon diimide, silicon nitrogenimide or amorphous silicon nitride powder is subjected to oxidation treatment. The resultant powdery precursor having 10.5-32wt.% oxygen content and >=200m<2> /g specific surface area is filled at <=0.15g/cm<3> packing density and fired at a high temp. of >=1,250 deg.C in a nitrogen-contg. inert gaseous atmosphere to obtain the objective silicon oxynitride power having 10-30wt.% oxygen content, 32-17wt.% nitrogen content, >=50m<2> /g specific surface area and 1.0-50μm median average diameter. This powder preferably has <=10% variation of the specific surface area after firing at 950 deg.C for 5hr in the air.
|
