DRY ETCHING DEVICE AND FILM FORMING DEVICE,申请号JP19960317576-传众专利搜索

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发明名称	DRY ETCHING DEVICE AND FILM FORMING DEVICE
摘要
申请公布号	JPH10158870(A)	申请公布日期	1998.06.16
申请号	JP19960317576	申请日期	1996.11.28
申请人	NIKON CORP	发明人	YAMADA HIDENOBU
分类号	C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H01L21/306	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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