发明名称 |
Integrated circuit device with isolated circuit elements |
摘要 |
A device with at least one noise-sensitive element, at least one noise-generating element, and a porous silicon barrier in the substrate is disclosed. The porous silicon barrier isolates the noise-sensitive element from the signals coupled into the substrate by the noise-generating element. A process for making this device is also disclosed.
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申请公布号 |
US5767561(A) |
申请公布日期 |
1998.06.16 |
申请号 |
US19970853582 |
申请日期 |
1997.05.09 |
申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
FREI, MICHEL RANJIT;KING, CLIFFORD ALAN;NG, KWOK K.;WESTON, HARRY THOMAS;XIE, YA-HONG |
分类号 |
H01L21/822;H01L21/762;H01L21/764;H01L27/04;(IPC1-7):H01L29/00 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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