| 摘要 |
An inventive array of thin film actuated mirrors is provided with an active matrix having an array of switching devices, an array of actuating structures and an array of mirrors, wherein each of the actuating structures is cantilevered on the active matrix, and each of the switching devices is positioned on the active matrix beside the position at which each of the actuating structures is cantilevered. In the array, during the operation of the array, since each of the mirrors is connected to the actuating structure through a recessed portion thereof, the mirror stays planar, allowing more accurate and effective reflection of the light beams, which will, in turn, enhance the overall optical efficiency of the array. Furthermore, since the active matrix has the array of switching devices is located beside each of the actuating structures, not directly therebelow, an electrical connection between each of the switching devices and the actuating structure can be made after all of the high temperature processes in the manufacture of the array have been completely, thereby minimizing the effects thereof.
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