发明名称 Leakage detect tool for vacuum bellows
摘要 A leakage detect tool, a system and method for the testing of gas leakage from a vacuum bellows is described. The leakage detect tool has a main cylindrical pipe having an auto-stop plate at one end of the main cylindrical pipe and a main flange at the other end of the main cylindrical pipe. A secondary cylindrical pipe is attached to the side wall of the main cylindrical pipe at an angle. A secondary flange is attached to the secondary cylindrical pipe at the end opposite the main cylindrical pipe. A vacuum bellows is placed within the main cylindrical pipe, a top flange seals the vacuum bellows to the main flange, and a test gas (tracer gas) is instilled to inflate the vacuum bellows. An interior space between the vacuum bellows and the side wall of the main cylindrical pipe is evacuated by a vacuum pump that is coupled to the secondary flange. A test gas detector is coupled to the secondary flange and activated to detect the presence of the test gas in the interior space of the main cylindrical pipe. If there is a presence of the test gas or tracer gas in the interior space, the vacuum bellows has damage or defects.
申请公布号 US5767391(A) 申请公布日期 1998.06.16
申请号 US19960756087 申请日期 1996.11.25
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD 发明人 WONG, MIDAS
分类号 G01M3/20;(IPC1-7):G01M3/04 主分类号 G01M3/20
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