发明名称 Thin-film transistor having a plurality of island-like regions
摘要 A thin-film transistor comprising an active silicon pattern which is formed of a plurality of island-like regions arranged in parallel to each other, the island-like regions being formed of a polycrystal silicon thin film and each having a plane area of 1000 mu m2 or less.
申请公布号 US5767529(A) 申请公布日期 1998.06.16
申请号 US19960623506 申请日期 1996.03.28
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOBORI, ISAMU;ARAI, MICHIO
分类号 H01L21/324;H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/76;H01L29/04;H01L27/01 主分类号 H01L21/324
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