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发明名称
FORMING METHOD OF INTERMETAL INSULATING FILM
摘要
申请公布号
KR0138124(B1)
申请公布日期
1998.06.15
申请号
KR19940013721
申请日期
1994.06.17
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
SHIN, DONG-SUN;NA, KEUN-JOO;AHN, YONG-KOOK
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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