发明名称 |
EINKRISTALLINE MIKROSPITZE, IHRE HERSTELLUNG UND IHRE ANWENDUNGEN |
摘要 |
A microtip has a tip portion forced by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion. The microtip is produced by breaking and splitting a single crystal by giving a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal. A surface-observing apparatus for observing a surface of a specimen and an information-treating apparatus comprise a tip in proximity to the specimen to be observed or a recording medium, and conduct the surface observation or the writing or reading by using the tip, respectively. <IMAGE> |
申请公布号 |
AT167298(T) |
申请公布日期 |
1998.06.15 |
申请号 |
AT19920301571T |
申请日期 |
1992.02.25 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KAWASE, TOSHIMITSU;TAKAMATSU, OSAMU;HATANAKA, KATSUNORI;SHINJO, KATSUHIKO |
分类号 |
G01B21/30;C30B33/00;G01B5/28;G01B7/34;G01N27/00;G01Q60/10;G01Q60/24;G01Q70/06;G01Q70/10;G01Q70/16;G01Q80/00;G11B9/00;G11B9/14;(IPC1-7):G01N27/00 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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