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发明名称
METHOD FOR WET ETCHING FOR FORMING A GRATING
摘要
申请公布号
KR0140846(B1)
申请公布日期
1998.06.15
申请号
KR19930030762
申请日期
1993.12.29
申请人
HYUNDAI ELECTRONICS CO.,LTD
发明人
KANG, JOONG-KOO;KANG, MYUNG-KOO;CHO, KYU-SUK;KIM, RAE-SUNG;YU, SOON-JAE
分类号
G03F7/00;G03F7/30;(IPC1-7):G03F7/30
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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