MULTILAMINATE PIEZOELECTRIC HIGH VOLTAGE STACK

摘要

A shock or strain driven multilaminate piezoelectric high voltage stack, and fabrication process. The nanostructure includes alternating layers of piezoelectric and conductor materials forming a cylinder or similarly shaped stack of piezoelectric layers. For accelerator application the piezoelectric layers have a coaxial cavity. Very high voltages or high voltage waves can be generated when the piezoelectric stack is subjected to mechanical stock, which may be the result of a high explosive detonation or a more conventional mechanism. As the shock propagates through the piezoelectric stack, each layer of piezoelectric material generates a voltage potential between its two adjacent conductor layers. The voltage of each conductor layer is the sum of the voltages of preceding piezoelectric layers, as in batteries in series. For accelerator applications, charged particles at one end of the cavity in the stack are accelerated through the cavity to a target. The piezoelectric stack can be fabricated with discrete layers of piezoelectric and conductor materials stacked and mechanically bound within packaging or support material. Alternatively, integrated solid state piezoelectric stacks can be fabricated by the successive masked deposition of piezoelectric and conductor materials. Deposition of the materials can be carried out by physical or chemical vapor deposition, including RF sputtering and similar techniques.