发明名称 METHOD AND APPARATUS FOR MEASURING THE PIEZOELECTRIC CONSTANT OF A THIN FILM TYPE PIEZOELECTRIC MATERIAL
摘要 <p>Disclosed are method for measuring a piezoelectric constant and an apparatus for performing the same. A piezoelectric material is positioned on a supporting member. A pressing probe is positioned above the material. A pressing member applies a pressure to the material through the pressing probe. A main valve is open. A release valve for changing the pressure is adjusted while the main valve is open. Charge generated from the material is measured by a charge measuring member. The magnitudes of measured charge and applied pressure are recorded in a computing member. The piezoelectric constant of material is calculated from the recorded magnitudes by the computing member. The piezoelectric constant can be measured by using a pneumatic loading method and by applying a uniform force to the whole surface of the material regardless of a topology of the material, without causing a short or a plastic deformation.</p>
申请公布号 WO1998025150(A1) 申请公布日期 1998.06.11
申请号 KR1996000235 申请日期 1996.12.06
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