| 摘要 |
Methods of manufacture and devices for performing active biological operations utilize laminated structures (30, 110). In the preferred embodiment, a first planar sample support (50, 72, 104, 122) includes at least one sample through hole (56, 74, 90) a planar electrode (32, 70, 94, 112, 114) is disposed adjacent the first planar sample support (50, 72, 104, 122), and includes an electrode through region (38, 76), a second planar support (40, 78, 96, 102, 124) includes a vent through hole (48, 80, 92, 98), the planar electrode (32, 70, 94, 112, 114) being in a laminated relationship between the first planar sample support (50, 72, 104, 122) and the second planar support (40, 78, 96, 102, 124), further characterized in that the sample through hole (56, 74, 90), electrode through hole (38, 76) and vent through hole (48, 80, 92, 98) are in overlapping arrangement. Preferably, some or all of the through holes, through regions and vent through holes are aligned. In one embodiment, the lateral dimension of the vent through hole is larger than the lateral dimension of the electrode through hole. In an alternative embodiment, the lateral dimension of the sample through hole is larger than the lateral dimension of the vent through hole. In the preferred embodiment, the sample support and planar support are formed of sheet material, most preferably polyimide, having a thickness from substantially 1 to substantially 5 mils. Electrodes are preferably chosen from noble metals, especially gold. Holes or through regions are preferably formed through laser drilling, optionally followed by chemical etching. Interconnect vias provide conductive paths through multiple supports, and are advantageously utilized with hybridized circuitry, especially chip-on flex circuitry. |
